HOMELOCATIONSITEMAPKorea

Air pollution control technology provides. The best environment solution in which leaders  MAT

PRODUCT

  • air pollution control
  • Odor measurement facility
  • Heat & Wet
  • Wet
  • Semi Dry
  • EPI
  • Heat & Catalytic

EPI

HOMEPRODUCTEpi

MAT1207BW 이미지

Flushing Type
MAT502W

Summary

  • Wet type Scrubber for Epi Process
  • 4 Chamber in system with multi-stage Treatment
  • Venturi water nozzle system with long gas pass (Wetting zone) design
  • Inlet anti clogging System
  • Automatic PLC control with Touch screen
  • Certified CE Mark

Capacity

500slm

Dimensions

780(W) x 750(D) x 1920(H)mm

Weight

400kg(Dry)

Utilities

  • Power : A/C 200~240V, 3phase, 15Amp
  • N₂: 4~7kgf/cm²(15slm), 1/4″Swagelok, Inlet Purge
  • City Water : 3~5kgf/cm²(8ℓ/min), 1/2″PVC Pipe
  • Gas Inlet : NW50 Flange NW40
  • Drain : Acid Drain 1) Natural Drain : 40A PVC Pipe
    2) Power Drain : 26mm PVC Pipe
  • Gas Exhaust : -50~-100mmH2O, 1m³/min, 50mm PVC Pipe
  • Cabinet Exhaust : -50mmH2O, 1m³/min, 75mm PVC Pipe