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Air pollution control technology provides. The best environment solution in which leaders  MAT

PRODUCT

  • air pollution control
  • Odor measurement facility
  • Heat & Wet
  • Wet
  • Semi Dry
  • EPI
  • Heat & Catalytic

WET

HOMEPRODUCTWet

MAT1207BW 이미지

Flushing Type
MAT403W

Summary

  • Wet type system
  • Inlet anti clogging System
  • Safety design with metal core frame and reinforced plastic
  • Dual path design with high efficiency for Wet Chamber
  • PLC control with Automatic system
  • Certified Semi S2 Mark

Capacity

400slm

Dimensions

735(W) x 882(D) x 1950(H)mm

Weight

200kg(Dry)

Utilities

  • Power : A/C 200~240V, 3phase, 15Amp
  • N₂: 4~7kgf/cm²(20slm), 1/4″Tube(Optional)
  • City Water : 3~5kgf/cm²(3ℓ/min), 3/8″Tube
  • Gas Inlet : NW50 Flange 4ports
  • Drain : Acid Drain 1) Natural Drain : 40A PVC Pipe 2) Power Drain : 26mm PVC Pipe
  • Gas Exhaust : -50~-100mmH2O, 1m³/min, 76mm PVC Pipe
  • Cabinet Exhaust : -50mmH2O, 1m³/min, Φ100mm(Optional)

Utilities 이미지