POU Abatement System (ENG)

CAPACITY
500slm / 2000slm / 3000slm

Summary

• High-temperature catalytic processing facility that combines the fluorine catalyst oxidation technology with wetting technology to simultaneously process combustible and soluble gas and NF3 at high efficiency
• Using electric heater and waste gas reaction heat without separate fuel (LNG) combustion, it causes very low thermal NOx by oxidizing waste gas.
• Cartridge can be maintained conveniently while minimizing contamination in FAB by applying a swap method for exchanging and retrieving Cartridge in the field without cleaning

CAPACITY
500slm / 1000slm / 1500slm / 3500slm / 4000slm

Summary

• Electrical Heater and wet treatment technology are combined to process combustible and water-soluble gases
• Maximize waste gas treatment with low driving costs
• Powder Applicable to heavy-duty and corrosion processes
• Manage and maintain conveniently through the quick and easy separation of the chamber and the wet department

CAPACITY
500slm

Summary

• The combination of Plasma technology and wet-type technology enables high-efficiency processing of PFCs gas such as CF4, CF2F6, SF6
• Development of Torch Technology for High Pressure and Low Power enables stable long-term Torch operation
• Maximize economy in operation of equipment by applying major part module system

CAPACITY
500slm

Summary

• High-efficiency facility for processing PFCs gas by combining direct combustion technology with wet-tyle technology
• Applies turbulence flame and water-wet devices in the chamber, enabling stable system operation at low cost
• Multiple safety interlock systems are installed to prevent unexpected accidents
• Manage and maintain conveniently through the quick and easy separation of the chamber and the wet department

CAPACITY
500slm, 3000slm, 9000slm

Summary

• Specialized in Metal Powder production process
• The independantly developed Inlet anti-blocking device and Venturi device enable stable facility operation
• The four independent wet department make up the maximum gas treatment.

CAPACITY
500slm, 1500slm

Summary

• Many hydrogen-use process (EPI) dedicated
• With the world’s only large capacity EPI process equipment, two Chambers can be processed simultaneously
• The independantly developed Inlet anti-blocking device and Venturi device enable stable facility operation
• The four independent wet department make up the maximum gas treatment.