POU Abatement System (ENG)

POU Abatement System

POU Abatement System handles waste gas emitted during production processes in semiconductors, DISPLAYs, and related fields with high efficiency.

Products Line Up

FCTO

(Flameless Catalytic Thermal Oxidation)

  

700W / 2001W / 3001W
CAPACITY
500slm / 2000slm / 3000slm

Summary

  • High-temperature catalytic processing facility that combines the fluorine catalyst oxidation technology with wetting technology to simultaneously process combustible and soluble gas and NF3 at high efficiency
  • Using electric heater and waste gas reaction heat without separate fuel (LNG) combustion, it causes very low thermal NOx by oxidizing waste gas.
  • Cartridge can be maintained conveniently while minimizing contamination in FAB by applying a swap method for exchanging and retrieving Cartridge in the field without cleaning


Heat – Wet

508BWA / 1208BWA / 1501hw / Mi2000BW / Mi2500BW

CAPACITY
500slm / 1000slm / 1500slm / 3500slm / 4000slm

Summary

  • Electrical Heater and wet treatment technology are combined to process combustible and water-soluble gases
  • Maximize waste gas treatment with low driving costs
  • Powder Applicable to heavy-duty and corrosion processes
  • Manage and maintain conveniently through the quick and easy separation of the chamber and the wet department


Plasma – Wet

  

603PW
CAPACITY
500slm

Summary

  • The combination of Plasma technology and wet-type technology enables high-efficiency processing of PFCs gas such as CF4, CF2F6, SF6
  • Development of Torch Technology for High Pressure and Low Power enables stable long-term Torch operation
  • Maximize economy in operation of equipment by applying major part module system

Burn – Wet

651FW
CAPACITY
500slm

Summary

  • High-efficiency facility for processing PFCs gas by combining direct combustion technology with wet-tyle technology
  • Applies turbulence flame and water-wet devices in the chamber, enabling stable system operation at low cost
  • Multiple safety interlock systems are installed to prevent unexpected accidents
  • Manage and maintain conveniently through the quick and easy separation of the chamber and the wet department

Wet

502W / 502W_3K / 502W_9K
CAPACITY
500slm, 3000slm, 9000slm

Summary

  • Specialized in Metal Powder production process
  • The independantly developed Inlet anti-blocking device and Venturi device enable stable facility operation
  • The four independent wet department make up the maximum gas treatment.
505W / 1505W
CAPACITY
500slm, 1500slm

Summary

  • Many hydrogen-use process (EPI) dedicated
  • With the world’s only large capacity EPI process equipment, two Chambers can be processed simultaneously
  • The independantly developed Inlet anti-blocking device and Venturi device enable stable facility operation
  • The four independent wet department make up the maximum gas treatment.

Major Customers

Delivering quality is out promise to the customers.

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