PRODUCT
Discover products built on 30 years of
engineering expertise.
Thermal & Wet
Thermal & Wet
컨텐츠 블랭크 이미지
Thermal
& Wet
  • NF₃
  • Powder
  • Diffusion
  • Key Functions
    • Extended PM cycle through high-capacity powder treatment
    • Improved NF₃ removal efficiency using a high-temperature heater
    • Enhanced wetting performance
      ➜ Multi-layer wetting zones with water-film nozzles
    • High-performance “Turbo” style burning-air supply design
    • Anti-clogging measures
    • Anti-corrosion measures
  • Features
    • Touchscreen-equipped automatic PLC controls
    • Easy disassembly of Burn/Wet module
    • Built-in water-recirculation system
  • Specifications
    • Recommended Process : Diffusion
    • Handling Capacity : 500, 1000, 3500, 4000 slm