PRODUCT
Discover products built on 30 years of
engineering expertise.
Burn-Wet
Fuel Burn & Wet
컨텐츠 블랭크 이미지
  • PFC
  • CVD
  • Etch
  • Key Functions
    • Three turbulent burner nozzles
      ➜ Improved PFC removal efficiency
    • Three-layer wetting zones
    • Anti-clogging & anti-corrosion measures
      ➜ N₂ shield and water-flowing wall
    • Multi-safety interlock structure
    • Energy-saving system
  • Features
    • Touchscreen-type automatic PLC controls
    • Easy disassembly of Burn/Wet module
    • Built-in type water recirculation system
  • Specifications
    • Recommended Processes : CVD, Etch
    • Handling Capacity : 500 slm