Flameless Catalytic Thermal Oxidation + Wet
컨텐츠 블랭크 이미지
  • VOCs
  • NF₃
  • CVD
  • Key Functions
    • High-efficiency gas treatment technology without fuel combustion
      ➜ Uses ceramic / metallic ball catalyst  
      ➜ Heater using radiant heat
    • High performance through wet-column design
      ➜ Multi-layer wetting zones with water film nozzles
    • High DRE through complete oxidation of VOCs
    • More than 95% DRE for NF₃ treatment
    • Low NOx generation and emission
    • Low THC emission
    • Swap-kit maintenance
      ➜ Enhanced safety and cleaning efficiency
  • Features
    • Auto PLC controls with touchscreen interface
    • Easy and quick maintenance using replaceable cartridges
    • Built-in water-recirculation structure
  • Specifications
    • Recommended Process : CVD
    • Handling Capacity : 700, 2000 slm