PRODUCT
Discover products built on 30 years of
engineering expertise.
Plasma-Wet
Plasma-Wet
컨텐츠 블랭크 이미지
  • PFC
  • N₂O
  • CVD/Etch
  • Key Functions
    • High-voltage, low-current operation enabling low power use and high PFC removal efficiency
      ➜ Low power consumption provides high PFC removal performance
      ➜ Internal castable material enhances corrosion resistance and heat retention
    • Highly durable plasma torch
      ➜ Indirect process gas contact with 2 anode zones and 4 N₂ nozzles
    • High efficiency through suppression of PFC recombination (>95%)
      ➜ Steam injection system
    • High N₂O removal efficiency (>95%)
  • Features
    • Externally replaceable torch
    • Touchscreen-type automatic PLC controls
    • Easy disassembly of reactor/wet module
    • Built-in type water recirculation system
  • Specifications
    • Recommended Processes : CVD, Etch
    • Handling Capacity : 500 slm