PRODUCT
Discover products built on 30 years of
engineering expertise.
Wet
Wet
컨텐츠 블랭크 이미지
  • Wet Etch
  • EPI
  • Powder-Protection
  • Key Functions
    • Stepwise treatment method
      ➜ Four-stage chambers system  
      ➜ 2 pre-wetting stages + venturi + final wetting with absorber
    • Etch process with 3” inlet
      ➜ Water spin unit and N₂ shield at gas inlet  
      ➜ Prevents powder clogging with inlet cleaning system
    • Multi-safety system applied
    • Auto pressure control system
    • Suitable for metal etch processes
  • Features
    • Touchscreen-equipped automatic PLC controls
    • PM possible without opening the chamber
    • Built-in type water recirculation system
  • Specifications
    • Recommended Processes : Wet Etch, EPI